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 > PRODUCTS |
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Plasma emission analysis from foreline gas Leak/Fault detection
Process optimization
(Cleaning/Seasoning) CVD, ALD
 AEGIS-1000 |
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C-Series |
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Spectrometer type In-situ monitoring Full spectrum(200-800nm) NanoASA S/W |
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 M-Series |
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Monochromator type Auto/Manual scan NanoEPD S/W |
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 F-Series |
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Filter type Wavelenght
selectable |
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FZA-100 |
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Optics laser assembly CCD array |
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Accessories |
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Filter, Mirror, Lens, Polarizer
Fiber optic |
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Wet Etcher EPD 
Repair Service
