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 > PRODUCTS > EPD/OES > M-Series |
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나노텍 EPD M-Series는 반도체, LCD 생산 공정의 etching, ashing 및 developing 과정에서 plasma로 인한 gas의 emission light을 PMT sensor를 통해 실시간으로 수광, 분석함으로써 공정의 종료점(Endpoint)을 검출한다.
M-Series의 software인 NanoEPD는 OES(Optical Emission Spectrascopy)
기능 뿐만아니라, 노이즈가 포함된 매우 미세한 변화의 신호를 처리할 수 있는
다양한 종류의 알고리즘을 포함하고 있어서, 다양한 공정에 적용될 수 있다.
- Monochromator module and integration software NanoEPD
- Control the process accurately and stably
- Improve production yield-rate
- Cope with the change of process promptly
- High resolution
- Analog signal output, 0~10VDC
- Gain adjustable
- 200-800nm available
- Use the flexible fiber optic |
※ EPD/OES : End Point Detector / Optical Emission Spectra-scope
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| ITEM |
DESCRIPTION |
| Input |
±15VDC |
| Output |
Analog signal, 0~10VDC |
| Gain value |
Adjustable |
| Detecting sensor |
PMT or Enhanced detector |
| Wavelength [nm] |
200~800 |
| Focal length [nm] |
100 |
| Light distribution |
Fiber optic, 1.5m default |
| Size [mm] |
192(W)x85(H)x142(D) |
| Weight [kg] |
About 2 |
| Compatibility |
Applicable to AMI, Luxtron |
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| ITEM |
DESCRIPTION |
| Controller |
Industrial computer type |
| Communication hardware |
Interface card(PCI) ,RS232C, Ethernet, Digital I/O board |
| Integration software |
NanoEPD |
| Process |
Metal, Poly silicon, Dielectric and ITO etc. |
| Channel |
2Ch, 4Ch extendable |
| Chamber attach |
Fiber optic |
| Optical scanning |
Motorized |
| Display |
15" TFT-LCD monitor |
| Application |
Etcher, Asher and CVD in a field of semiconductor and LCD etc.
Chemical spectrum analysis |
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| MODEL |
NEM61-VM |
| Wavelength |
200-800nm |
| Resolution |
0.25nm |
| Slit |
Exchangeable |
| Focal length |
100nm |
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| MODEL |
NEM10-309 |
NEM10-MO |
NEM61-MO |
| Type |
'M' type
(Manual scan) |
'A' type
(Auto scan) |
| Drive board |
- |
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○ |
| Resolution |
≤1nm |
0.25nm |
0.25nm |
| Slit |
Variable |
Variable |
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| Communication |
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RS232C |
RS232C |
| Extendibility |
- |
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