AEGIS series are the sensor analyzing the gas by its emitted spectra through plasma. AEGIS products are installed on the process chamber, at fore-line in the semiconductor/display manufacturing facility, and provide information of the process change so users identifies the leak, the faults and end points of the process etc.
√ No. 1 Market share in Korea √ Industry experience through over 4,000 installation both in domestic and overseas √ Technical expertise, developed by own technology √ Knowledge and know-how for various customer specific environment √ Continuous upgrade in the application in response to customer feedback √ H/W, S/W customization options available to fit customer needs
- PVD, (PE)CVD, (PE)ALD, Etcher, all TM @semiconductor/display manufacturing - Ti TM/PM, W PM, WN TM/PM/Ex, TSN TM, C&C(Si etch) TM, OxALD PM, Diffusion PM - In-situ leak detection - ALD Source monitoring - Dry cleaning endpoint optimization - Process fault detection - In-situ fault detection caused by any chamber condition’s changes - Necessary in-situ gas monitoring to prevent unexpected process accident
- RF plasma ignition : 0mT~10Torr - In-situ monitoring for 200~850nm - Use highly sensitive CCD sensor(2,048pixels) - Advanced EPD algorithms : Fine leak detection algorithm, Life time management
3. SPOES vs. RGA (in CVD/ALD/Etcher processes)
Impossible because of damaging from reactant gases such as F, Cl
Window & Tube (>1 year)
Maintenance parts (Period)
Filament (< 3 months)
Starting Pressure of Discharge
Detectors / Controller
1~4 (Max. 12)
2048 pixels / 16bits
200~850nm (UV to NIR)
Scan Time (Interval Time)
CCD Plasma Source Power
Windows XP, Windows7
AOS (AEGIS Operating Software)
TCP/IP, SECS, SECSII/GEM, SSCP Customiztion options available
ISO NW25 (Reducer Available)
√ Process specific Models available for extending Life time !!!
AEGIS-7W - for Process Chamber (Tungsten) - Contamination Free Module Upgrade (patented)
AEGIS-7NH - for Process Chamber(use at the case of contamination from viscous powder) - Contamination Free Module Upgrade (patented) - Heating Type
√ Model options to fit customer environment !!!
SMC-10 (standard type) - Horizontal Type - 3U 19” rack mount type
SMC-10H (I) - Vertical Type - Keyboard, Mouse, Monitor all in one type
SMC-10H (II) - Vertical Type - with Work Table & Monitor Arm
1. Leak Detection
2. Cleaning Optimization
3. Process Analysis
4. ALD Source Verification
NANOTECH COMPANY REG NO : 109-81-54438 (16882) 261-1, Daeji-ro, Suji-gu, Yongin-si, Gyeonggi-do, South Korea Tel.82-2-837-8867~8. Fax.82-2-837-8820, E-mail. firstname.lastname@example.org Copyright(c) NANOTECH Company. All Rights Reserved.