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Chamber Plasma Monitor

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2PM (Pulsed Plasma Monitor)
2PM is real-time optical monitoring sensor used in the plasma based-etching, deposition processes of the FAB. It monitors the plasma, its optical emission through a viewport window on the plasma chamber. The pulsed waveform is checked to maintain stability and accuracy of the processes.
 
Customer Benefits

√ Time Resolution: 1 micro second!
√ Measure 1~20kHz range of pulsed plasma repetition rate
√ Improve production yield-rate
√ Separate sensing through viewport, not affect the process
√ Optimized solution for HW/SW to detect plasma fault
√ Easy to build and maintain, cost efficient


System Configuration
  1. Use sensor module to observe optical signal through the viewport window on the chamber
  2. Optical signal is converted to electrical signal
  3. Analog/digital conversion, then high speed TCP/IP transmission made to the PC
  4. Nano2PM S/W installed in a PC analyzes the pulse plasma in its wave form.
Specification
Category Item Description
Optic
Lens Module 2” Optics
Sensor Si Photodiode
Spectral Range 350~1100nm
Electric
Pulse Frequency Measuring Range 1~20kHz
Time Resolution 1μs
A/D Resolution 16bit
Sensor Rising Time 10ns
Sensor Active Area 13㎟ (3.6 x 3.6mm)
Power Input 220VAC (via Power Adapter)
Power Requirement DC7V 7W
Connector (4pin Tiny QG) Male Connector, DSP Board Power Supply
Connector (Ethernet TCP/IP) 10 Base-TX/100 Base-TX RJ-45 Interface 1 port, cable auto detect
Mechanic
Material (Body) Anodized Aluminum
Dimension 108(W) x 110(H) x 140(D) mm
Weight ~0.9kg
Software
O/S Microsoft Windows (.Net Framework 4.0)
Sensor Connection Count 1 ~ 2
Function Rising/Falling Time, Pulse-on/off Time, Period, Frequency,
Peak/Average Value etc
Main Function
  1. Display the waveform on the screen
    - Waveform generated by the high speed optical sensor is displayed on the graph
    - Users can view various waveform over time by controlling the time knob
    - Allow zoom in/out over a time sequence
    - Allow many ways of displaying signal information
    - Allow more detail measurement using Trigger function pausing the waveform display
  2. Pulse waveform analysis
    - Provide high speed analysis on all pulse waveform and provide 9 monitoring parameter values
    - Monitoring Parameter values are useful to determine the uniform level of pulse plasma
    - Alarming when fault events detected
① Rising Time
③ Pulse-on Time
⑤ Period
⑦ Peak Value = Max. over period
⑨ Duty Rate = Pulse-on ratio over period
② Falling Time
④ Pulse-off Time
⑥ Frequency = Reciprocal over period
⑧ Average Value = Mean over period
  3. Multi Screen View
  1) General View
    - Real-time trends of 9 monitoring parameter values output from pulse waveform analysis algorithm
  2) Detail View
    - Micro-view of the real-time pulse waveform, allowing the statistical ratio of the faults events