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Self-Plasma OES

HOME > PRODUCTS > Self-Plasma OES

Self-Plasma OES
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AEGIS Series
AEGIS series are the sensor analyzing the gas by its emitted spectra through plasma. AEGIS products are installed on the process chamber, at fore-line in the semiconductor/display manufacturing facility, and provide information of the process change so users identifies the leak, the faults and end points of the process etc.
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