Filter type EPD detects variation of specific light distributed by the band-pass filter.
- Control the process accurately and stably - Improve Production yield rate - Cope with the changes of process promptly
- Suggest the optimized solution for HW or SW to detect an endpoiny
- EPD (End Point Detection) - Dry etcher, Asher etc.
- can be applied where necessary to increase throughput by determining the optimal etch time
- In-situ monitoring for filtered wavelength of 10nm bandwidth - Use highly sensitive single Si photodiode
- Advanced EPD algorithms such as threshold and window method
- PR asher: single/multi layer, single/multi recipe - More than 3,000 are operated in semiconductor mass production line
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