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Pulsed Plasma Monitor

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2PM (Pulsed Plasma Monitor)
Etching, Deposition等工程使用Pulsed Plasma,?于??上pulse波形是否正??持,?行??monitoring 的光??感器
 
特点
√ Time Resolution : 1 micro second !
√ 1~20kHz 范??的 Pulsed Plasma Repetition Rate ?行?定
√ 在chamber 外部?viewport ?行?定,?工程?有影?,非常安全
√ ?便的安?,投入以及?持?用低廉


Customer Benefits

√ Improve production yield-rate
√ Separate sensing, not affect the process
√ Optimized solution for HW/SW to detect plasma fault
√ Easy and simple to build in low cost


System Configuration
  1. 通?安?在Chamber Viewport的Sensor Module的 Lens,?行光信?接收
  2. ?光信??化??子信?
  3. ?化A/D 用pc高速?送TCP/IP
  4. 通?使用安?在PC上的Nano2PM S/W 分析Pulse plasma的波形
Specification
Category Item Description
Optic
Lens Module 2” Optics
Sensor Si Photodiode
Spectral Range 350~1100nm
Electric
Pulse Frequency Measuring Range 1~20kHz
Time Resolution 1μs
A/D Resolution 16bit
Sensor Rising Time 10ns
Sensor Active Area 13㎟ (3.6 x 3.6mm)
Power Input 220VAC (via Power Adapter)
Power Requirement DC7V 7W
Connector (4pin Tiny QG) Male Connector, DSP Board Power Supply
Connector (Ethernet TCP/IP) 10 Base-TX/100 Base-TX RJ-45 Interface 1 port, cable auto detect
Mechanic
Material (Body) Anodized Aluminum
Dimension 108(W) x 110(H) x 140(D) mm
Weight ~0.9kg
Software
O/S Microsoft Windows (.Net Framework 4.0)
Sensor Connection Count 1 ~ 2
Function Rising/Falling Time, Pulse-on/off Time, Period, Frequency,
Peak/Average Value etc
Main Function
  1. ??pluse 波形
    - 快速?取pulse波形??面?示
    - 通????整?察各??率的波形形?
    - 依据Trigger功能,波形停止模式,?行?密?察
  2. Pulse 波形分析
    - 快速分析所有的pulse波形,?算出9?Monitoring Paramete??
    - 通?Monitoring Paramete??,判?Pulse plasma 的平均品?
    - 感知到?常信???生Alarm
① Rising Time
③ Pulse-on Time
⑤ Period
⑦ Peak Value = Period 내 최대값
⑨ Duty Rate = Period 내 Pulse-on 유지비율
② Falling Time
④ Pulse-off Time
⑥ Frequency = Period의 역수
⑧ Average Value = Period내 평균값
  3. Multi Screen View
  1) General View
    - Pulse 波形分析Algorithm?算出的9?Monitoring Parameter??Trend ??
  2) Detail View
    - ?Pulse波形?行???微?察, ?????常信?的?生比率