바로가기 메뉴


중문

主页 > PRODUCTS > 중문

2PM (Pulsed Plasma Monitor)
Etching, Deposition等工程使用Pulsed Plasma,对于实际上pulse波形是否正确维持,进行实时monitoring 的光学传感器
 
特点
√ Time Resolution : 1 micro second !
√ 1~20kHz 范围内的 Pulsed Plasma Repetition Rate 进行测定
√ 在chamber 外部对viewport 进行测定,对工程没有影响,非常安全
√ 简便的安装,投入以及维持费用低廉


Customer Benefits

√ Improve production yield-rate
√ Separate sensing, not affect the process
√ Optimized solution for HW/SW to detect plasma fault
√ Easy and simple to build in low cost


System Configuration
  1. 通过安装在Chamber Viewport的Sensor Module的 Lens,进行光信号接收
  2. 将光信号转化为电子信号
  3. 转化A/D 用pc高速传送TCP/IP
  4. 通过使用安装在PC上的Nano2PM S/W 分析Pulse plasma的波形
Specification
Category Item Description
Optic
Lens Module 2” Optics
Sensor Si Photodiode
Spectral Range 350~1100nm
Electric
Pulse Frequency Measuring Range 1~20kHz
Time Resolution 1μs
A/D Resolution 16bit
Sensor Rising Time 10ns
Sensor Active Area 13㎟ (3.6 x 3.6mm)
Power Input 220VAC (via Power Adapter)
Power Requirement DC7V 7W
Connector (4pin Tiny QG) Male Connector, DSP Board Power Supply
Connector (Ethernet TCP/IP) 10 Base-TX/100 Base-TX RJ-45 Interface 1 port, cable auto detect
Mechanic
Material (Body) Anodized Aluminum
Dimension 108(W) x 110(H) x 140(D) mm
Weight ~0.9kg
Software
O/S Microsoft Windows (.Net Framework 4.0)
Sensor Connection Count 1 ~ 2
Function Rising/Falling Time, Pulse-on/off Time, Period, Frequency,
Peak/Average Value etc
Main Function
  1. 显现pluse 波形
    - 快速读取pulse波形并画面显示
    - 通过时间调整观察各种频率的波形形态
    - 依据Trigger功能,波形停止模式,进行细密观察
  2. Pulse 波形分析
    - 快速分析所有的pulse波形,计算出9种Monitoring Paramete数值
    - 通过Monitoring Paramete数值,判断Pulse plasma 的平均品质
    - 感知到异常信号时发生Alarm
① Rising Time
③ Pulse-on Time
⑤ Period
⑦ Peak Value = Period 내 최대값
⑨ Duty Rate = Period 내 Pulse-on 유지비율
② Falling Time
④ Pulse-off Time
⑥ Frequency = Period의 역수
⑧ Average Value = Period내 평균값
  3. Multi Screen View
  1) General View
    - Pulse 波形分析Algorithm计算出的9个Monitoring Parameter实时Trend 确认
  2) Detail View
    - 对Pulse波形进行实时细微观察, 统计确认异常信号的发生比率