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EPD/OES

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CCD Type EPD Filter Type EPD
Image Contents Detail
OPTI Series
半导体,显示器制造工程chamber 内部的plasma通过光谱分析方法进行分析,自动检测工程的结束点,或者对工程的变化状态进行monitoring
NEFL Series
Filter type EPD detects variation of specific light distributed by the band-pass filter.
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