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Nanotek Inc.
   PRODUCTS
 
  + SPOES
     - AEGIS-1000
 
  + EPD
     - C-Series
     - M-Series
     - F-Series
     - Repair Service
    + Wafer Orienter
     - FZA-100
    + Light Source
     - Super Cure System
     - Optical Powermeter
     - Accessories
 
SPOES (Self Plasma OES)
AEGIS-1000
Plasma emission analysis from foreline gas
Leak/Fault detection
Process optimization(Cleaning/Seasoning)
CVD, ALD

 
EPD (End Point Detector)
C-Series
Spectrometer type
In-situ monitoring
Full spectrum(200-800nm)
NanoASA S/W
M-Series
Monochromator type
Auto/Manual scan
NanoEPD S/W

F-Series
 Filter type
Wavelenght selectable

 
Repair Service
AMAT, TEL, Lam Research
Diagnose & Repair
Wafer Orienter (Flat Zone Aligner)
FZA-100
Optics laser assembly
CCD array
      
Light Source

Super Cure Series
UV exposure system

   Optical Powermeter
Optical measurement for
high power
Accessories
Filter, Mirror, Lens, Polarizer
Fiber optic		      

 


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 153-801, #409 Leaders Tower, 60-15 Gasan-dong, Geumcheon-gu, Seoul, Korea
 TEL : 82-2-837-8867~8 | FAX : 82-2-837-8820 | E-mail : nanotek@nanotek.com