Monochromator module and integration software NanoEPD Control the process accurately and stably Improve production yield-rate Cope with the change of process promptly
High resolution
Analog signal output, 0~10VDC
Gain adjustable
200-800nm available
Use the flexible fiber optic
¡Ø EPD/OES : End Point Detector / Optical Emission Spectra-scope
SENSOR SPECIFICATION
ITEM
DESCRIPTION
Input
¡¾15VDC
Output
Analog signal, 0~10VDC
Gain value
Adjustable
Detecting sensor
PMT or Enhanced detector
Wavelength [nm]
200~800
Focal length [nm]
100
Light distribution
Fiber optic, 1.5m default
Size [mm]
192(W)x85(H)x142(D)
Weight [kg]
About 2
Compatibility
Applicable to AMI, Luxtron
INTERFACE CONTROLLER SPECIFICATION
ITEM
DESCRIPTION
Controller
Industrial computer type
Communication hardware
Interface card(PCI) ,RS232C, Ethernet, Digital I/O board
Integration software
NanoEPD
Process
Metal, Poly silicon, Dielectric and ITO etc.
Channel
2Ch, 4Ch extendable
Chamber attach
Fiber optic
Optical scanning
Motorized
Display
15" TFT-LCD monitor
Application
Etcher, Asher and CVD in a field of semiconductor and LCD etc.
Chemical spectrum analysis
MODEL SPECIPICATION
MODEL
NEM61-VM
Wavelength
200-800nm
Resolution
0.25nm
Slit
Exchangeable
Focal length
100nm
MODEL
NEM10-309
NEM10-MO
NEM61-MO
Type
'M' type
(Manual scan)
'A' type
(Auto scan)
Drive board
-
¡Û
¡Û
Resolution
¡Â1nm
0.25nm
0.25nm
Slit
Variable
Variable
-
Communication
-
RS232C
RS232C
Extendibility
-
¡Û
¡Û
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153-801, #409 Leaders Tower, 60-15 Gasan-dong, Geumcheon-gu, Seoul, Korea
TEL : 82-2-837-8867~8 | FAX : 82-2-837-8820 | E-mail : nanotek@nanotek.com
Monochromator module and integration software NanoEPD
High resolution